WORKSHOPS
CHAIRS
Thomas Alpert (Bosch, DE)
Mourad Elsobky (Bosch, DE)
ABSTRACT
Micro-electromechanical systems (MEMS) based sensors have been extensively utilized over the last two decades for automotive, industrial and consumer applications. Thanks to Bosch technology, such complex systems are in continuous improvement in terms of lower cost, lower power consumption and improved short- and long-term stability. In this workshop, the wide spectrum of integrated MEMS inertial measurement units (IMUs) are presented. The workshop will cover system architectures and circuit techniques for both accelerometer and gyroscope sensors. System budgeting, specification breakdown and tradeoffs, such as area utilization, energy efficiency, offsets and vibration robustness (VRE), are highlighted. In addition, various analog frontends, mainly discrete time and continuous time capacitance to digital converters (CDC), are discussed. Future trends in improving MEMS-based sensors performance driven by emerging applications and digital content are highlighted.
PROGRAM
13:00 - 14:00
Lunch
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14:00 - 14:30
Performance Improvements of Multi-Axis MEMS Gyroscopes
Tobias Hiller (Bosch, DE)
Micro-electromechanical systems (MEMS) vibrating gyroscopes have been extensively utilized over the last two decades for automotive, industrial and consumer applications. Thanks to their continuous improvements in terms of lower cost, lower power consumption and improved short- and long-term stability, they are being continually used in established as well as emerging applications, such as advanced driver-assistance systems (ADAS) and virtual reality (VR). In this talk, recent developments in performance improvement of some exemplary parameters are highlighted.
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14:30 - 15:00
State of the Art Accelerometer Sensors and CMOS Interface Electronics
Yunan Fu (Bosch, DE)
This talk will cover system architectures and circuit techniques for acceleration sensors. System budgeting, specification breakdown and tradeoffs, such as area utilization, energy efficiency, offsets and linearity, are highlighted. In addition, various sensor interface circuits, mainly discrete time and continuous time capacitance to digital converters (CDC), are discussed. Future trends in improving sensor performance driven by emerging applications and digital content are highlighted.
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15:00 - 15:30
Q&A
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15:30 - 16:00
Coffee break​
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16:00 - 16:45
​Interface Circuits for MEMS Gyroscopes
Mourad Elsobky (Bosch, DE)
Micro-electromechanical systems (MEMS) based sensors have been extensively utilized over the last two decades for automotive, industrial and consumer applications. Thanks to Bosch technology, such complex systems are in continuous improvements in terms of lower cost, lower power consumption and improved short- and long-term stability. In this talk, the wide spectrum of readout interface architectures for integrated MEMS gyroscopes is reviewed. It starts with comparing conventional mode-matched closed-loop and split-mode open-loop readout systems. Next, a benchmark for advanced readout architectures ranging from full analog to the digital-intensive approaches is presented. Finally, future trends in improving gyroscope performance driven by emerging applications are discussed.
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16:45 - 17:15
Q&A​​
BIOSKETCHES
Mourad Elsobky
Mourad Elsobky (Senior Member, IEEE) received the B.Sc. degree in Information Engineering and Technology from the GUC, Cairo, Egypt, in 2014, and the M.Sc. degree in Communications Technology from Ulm University, Germany, in 2015. In 2021, he received the Ph.D. degree from the University of Stuttgart, Germany, while being a Researcher with IMS CHIPS, Germany where his research focused on Hybrid Systems-in-Foil. Since 2020, he has been with Mobility Electronics, Robert Bosch GmbH, Reutlingen, Germany. He is the analog lead for IMU ASIC development. Mourad authored or co-authored 3 scientific books, several papers, and patents in the field of flexible electronics and inertial sensor systems.
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Tobias Hiller
Tobias Hiller received the M.Sc. degree in engineering cybernetics from the University of Stuttgart, Germany, in 2015, and the Ph.D. degree in electrical engineering from the University of Siegen, Germany, in 2021, under the supervision of Prof. Hubert Roth. For the master’s thesis, he spent a research stay at the Group of Prof. Kimberly (Turner) Foster, University of California, Santa Barbara (UCSB), USA. There, he was involved in the feedback control of MEMS nonlinear vapor sensors. He was a recipient of the Fulbright Scholarship. For the duration of three years, he was under a Ph.D. research contract with Robert Bosch GmbH, Reutlingen, Germany, where he is currently a Systems Engineer and Project Lead for the advance development of a MEMS inertial sensor product. His research interests include bias instability and cross-axis sensitivity of MEMS inertial sensors as well as inertial navigation.
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Yunan Fu
Yunan Fu (S’08-M‘12) received the M.S. degree of engineering in microelectronics and solid state electronics from the Harbin Institute of Technology, Harbin, China, in 2008, and the Ph.D degree in microelectronics and instrumentation from the University of Strasbourg, Strasbourg, France, in 2012. From 2013 to 2015, he was with Silicon line GmbH, Munich, Germany, where he designed high speed circuits for optical transceivers. Since November 2015, he has been with the Robert Bosch GmbH, Reutlingen, Germany, where he focuses on the design of automative sensor systems, including inertial sensor, ultrasonic sensor, pressure sensor and automatic braking sensor. ​​​