TUTORIALS

Microstructured components and systems are ubiquitous in our daily lives. As sensors, they are the basis for applications in the “Internet of Things/Industry 4.0 scenario and beyond and are applied as actuators in many different areas. Their functionality is not only in the transducer elements themselves, but in the entire microsystem, which includes the circuitry, packaging as well as data processing. This tutorial spans the arc from MEMS transducers and analog/mixed-signal circuit technology for sensor readout over simulation methods and digital twins to the entire MEMS co-integration ecosystem. Additionally, exemplary application scenarios for which MEMS serve as enablers are addressed.